Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Advance nanolithography"

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Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method

Mohammad Nuzaihan, Md Nor; Uda, Hashim, Prof. Dr.; Nazwa, Taib; Tijjani Adam, Shuwa (Trans Tech Publications, 2014)

A simple method for the fabrication of silicon nanowires using Electron Beam Lithography (EBL) combined with thermal oxidation size reduction method is presented. EBL is used to define the initial silicon nanowires of ...