Browsing Uda Hashim, Prof. Ts. Dr. by Subject "Alignment Mark"

Now showing items 1-1 of 1

    • Effect of alignment mark depth on alignment signal behavior in advanced lithography 

      Normah, Ahmad; Uda, Hashim; Mohd Jeffery, Manaf; Kader Ibrahim, Abdul Wahab (Universiti Malaysia Perlis, 2008)
      Finding a robust alignment strategy is one of the key evaluations in defining photolithography process. Alignment is a process to determine how the current pattern is placed on the wafer. Alignment is done by an optical ...