Browsing Raymond Boon Whee Heng, Prof. Dr. by Subject "Fabrication"
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Capacitive micromachined ultrasonic tranducers: Technology and application
(Elsevier B.V., 2012-03)Capacitive micromachined ultrasonic tranducers (cMUTs) have recently emerged as an alternative to conventional piezoelectric transducers. They offer many advantages in terms of bandwidth, fabrication of layer arrays, ...