Browsing Nashrul Fazli Mohd Nasir, Assoc. Prof. Dr. by Subject "Biomedical microdevices"
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Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications
(Institute of Electrical and Electronics Engineers (IEEE), 2012-02-27)3C-SiC is currently under intense study as a potential material for implantable low power blood pressure sensing due to its biocompatibility. In this work, we present and discuss the fabrication processes for n-type 3C-SiC ...