Browsing Mukhzeer Mohamad Shahimin, Dr. by Subject "Dry etching"

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    • Low loss optimization of strip channel polysilicon waveguide fabrication 

      Mukhzeer, Mohamad Shahimin, Dr.; Ang, Keng Chuan; Khor, Kang Nan (American-Eurasian Network for Scientific Information, 2013)
      Research on waveguide structures, its behaviour and material properties are very extensive for a wide range of applications. Generally, waveguides are used for optical devices such as biosensors. This paper investigates ...