Browsing Vithyacharan Retnasamy by Author "belg85@yahoo.com"
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Micro-reservoir depth determination with Twyman-Green Interferometer
Wan Mokhdzani, Wan Nor Haimi; Poopalan, Prabakaran, Assoc. Prof. Dr.; Retnasamy, Vithyacharan; Mohd Naim, Haron (Universiti Malaysia Perlis (UniMAP)Centre for Graduate Studies, 2010-10-16)A micro-reservoir is fabricated on transparent silica wafer using Reactive Ion Etching (RIE). The depth of the micro-reservoir has been measured using profilometer, Atomic Force Microscopy (AFM) and Twyman Green-Interferometer. ...