Browsing Yufridin Wahab, Assoc. Prof. Dr. by Subject "Fabrication"
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Silicon implementation of micro pressure sensor
(Institute of Electrical and Electronics Engineers (IEEE), 2010-04-12)Pressure sensing is one of the mostly performed measurement encompassing varieties of applications. The latest technology such as silicon based Micro-electromechanical Systems (MEMS) technology is favoured due to its ...