Design and simulation of force sensor with piezo resistive rectangular strain gauge

Abstract

The design and simulation of force sensor with piezo resistive rectangular strain gauge is presented in the paper. A piezo resistive metal gauge on thin rectangular membrane is designed based on ANSYS simulation result. A force sensor having piezo resistive rectangular strain gauge on thin plate is designed. The simulation result yields the percentage of strain transferred from thin plate to substrate and to the gauge due to the applied force. Theoretical studies on piezo resistive metallic gauge on rectangular membrane and force sensor are presented. A maximum of 0.70348με and maximum resistance change in gauge (grid) = 177.27μΩ are achieved for an applied force of 1mN.