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dc.contributor.authorTijjani Adam, Shuwa
dc.contributor.authorUda, Hashim, Prof. Dr.
dc.contributor.authorLeow, Pei Ling
dc.contributor.authorQazi Muhammad, Humayun
dc.date.accessioned2013-02-13T06:23:11Z
dc.date.available2013-02-13T06:23:11Z
dc.date.issued2013
dc.identifier.citationAdvanced Materials Research, vol.626, 2013, pages 1042-1047en_US
dc.identifier.issn1022-6680
dc.identifier.urihttp://www.scientific.net/AMR.626.1042
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/23472
dc.descriptionLink to publisher's homepage at http://www.ttp.net/en_US
dc.description.abstractThe paper present a report on fabrication of Nanowire using plasma oxidation, we monitor changes by studying the morphology and Δw/Δh, the study also revealed that the proposed fabrication method could potentially be used to fabricate specific nanometer-scale structure and space structure with uniform surface morphology without any damage to the photoresist. Yet with reduced ashing time and without popping of the photoresist ashing process when the a fabricated is being carried out and subsequently trimmed to nano size by plasma oxidation, the study also revealed the dramatic increase in aspect ratio as the structure reduces in lateral dimension.en_US
dc.language.isoenen_US
dc.publisherTrans Tech Publicationsen_US
dc.subjectAsh trimmingen_US
dc.subjectFabricationen_US
dc.subjectNanowireen_US
dc.subjectPhotoresisten_US
dc.subjectPlasma oxidationen_US
dc.titleFabrication of nanowire using ash trimming techniqueen_US
dc.typeArticleen_US
dc.contributor.urltijjaniadam@yahoo.comen_US
dc.contributor.urluda@unimap.edu.myen_US
dc.contributor.urlleowpl@fke.edu.myen_US
dc.contributor.urlqazihumayun2@gmail.comen_US


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