| dc.contributor.author | Wan Mokhdzani, Wan Nor Haimi | |
| dc.contributor.author | Poopalan, Prabakaran, Assoc. Prof. Dr. | |
| dc.contributor.author | Retnasamy, Vithyacharan | |
| dc.contributor.author | Mohd Naim, Haron | |
| dc.date.accessioned | 2012-11-05T08:53:54Z | |
| dc.date.available | 2012-11-05T08:53:54Z | |
| dc.date.issued | 2010-10-16 | |
| dc.identifier.isbn | 978-967-5760-03-7 | |
| dc.identifier.uri | http://dspace.unimap.edu.my/123456789/21619 | |
| dc.description | International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia. | en_US |
| dc.description.abstract | A micro-reservoir is fabricated on transparent silica wafer using Reactive Ion Etching (RIE). The depth of the micro-reservoir has been measured using profilometer, Atomic Force Microscopy (AFM) and Twyman Green-Interferometer. Depth of micro-reservoir obtained from Twyman Green-Interferometer is 0.566 um using fringe shifting and intensity measurements while according to the profilometer and AFM surface analysis, the depth of micro-reservoir is 0.651 um and 0.619 um. This implies that the Twyman Green Interferometer can be use to measure depth of micro-reservoir. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Universiti Malaysia Perlis (UniMAP) | en_US |
| dc.relation.ispartofseries | Proceedings of the International Postgraduate Conference on Engineering (IPCE 2010) | en_US |
| dc.subject | Micro-reservoir | en_US |
| dc.subject | Twyman Green-Interferometer | en_US |
| dc.subject | Atomic surface microscopy (AFM) | en_US |
| dc.subject | AFM surface analysis | en_US |
| dc.title | Micro-reservoir depth determination with Twyman-Green Interferometer | en_US |
| dc.type | Working Paper | en_US |
| dc.publisher.department | Centre for Graduate Studies | en_US |
| dc.contributor.url | belg85@yahoo.com | en_US |
