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Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 175 |
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Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 3 | 13 | 8 | 17 | 5 | 12 | 0 |
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Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous.pdf | 34 |
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