Browsing School of Microelectronic Engineering (FYP) by Author "Azleen Abu Talib"

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Comparison Of Etching Optimization Process By Taguchi Method Using Minitab And Design Expert Software

Azleen Abu Talib (School of Microelectronic Engineering, 2007-04)

A design of experiment for high throughput pad etch by reactive ion etch is reported. Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. The L9 orthogonal ...