Browsing School of Microelectronic Engineering (FYP) by Author "Hafizal Hafiz Sarjoni"
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Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide
Hafizal Hafiz Sarjoni (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major ...