Browsing School of Microelectronic Engineering (FYP) by Author "Mohamad Fadzli Ali"
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Study of the thickness of the Silicon Dioxide on wafer using Dry and Wet Oxidation method
Mohamad Fadzli Ali (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Studies of the interaction of O2 and O with Si(100) at a fundamental level are reviewed. Both atomic and molecular chemisorbed species have been found on these surfaces. STM studies have given a great deal of information ...