Browsing School of Microelectronic Engineering (FYP) by Author "Noor Aini Hamimah Abd. Rahim"
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Reactive Ion Etching (RIE) Etched Wet-Silica-On-Silicon Analysis for Fluid Wettability
Noor Aini Hamimah Abd. Rahim (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)RIE etched wet silica-on-silicon analysis is more to surface roughness analysis which analysis on silica substrate after plasma etching especially on de-ionized water droplets testing for fluid wettability scope. The thick ...