Browsing School of Microelectronic Engineering (FYP) by Author "Norain Mohd Saad"
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Gate Oxide Integrity (GOI) Characterization For Deep Submicron CMOS Device
Norain Mohd Saad (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Since the early days of Very Large Scale Integration (VLSI) era, the scaling of gate oxide thickness has been instrumental in controlling the short channel related effects in state-of-the-art device structure, as MOS gate ...