Browsing School of Microelectronic Engineering (FYP) by Author "Ruhaizi Mohd Hatta"
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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
Ruhaizi Mohd Hatta (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Single crystal 3C-SiC capacitive pressure sensors are proposed for high-temperature sensing applications. SiC is an attractive material for harsh environment micromachined transducers due to its outstanding electrical, ...