Browsing School of Microelectronic Engineering (FYP) by Author "Shaiful Nizam Mohyar (Advisor)"
Now showing items 1-5 of 5
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Analysis of square shaped Microstructure based Electron Beam induced deposition
Siti Fatimah Abd. Rahman (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly ... -
Analysis of the deposited carbon during Electron Beam Induced Deposition (EBID) in Scanning Electron Microscope using Secondary Ion Mass Spectrometry (SIMS)
Nur Liana Kamal (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron beam induced deposition (EBID) has been used to deposit carbon films that are similar ... -
The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method
Muhammad Afiq Abdul Aziz (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used ... -
Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
Muhammad Afif Abdul Rahman (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope ... -
Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
Mohamad Sharizal Md Ilias (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on ...