Browsing School of Microelectronic Engineering (FYP) by Author "Wan Mokhdzani Wan Nor Haimi"
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Vertical electrostatic comb drive actuator for MEMS design
Wan Mokhdzani Wan Nor Haimi (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were ...