Browsing School of Microelectronic Engineering (FYP) by Author "Zainab Ramli"
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Simulation of Ion Implantation using Monte Carlo Method for Investigation on Ion Trajectories
Zainab Ramli (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-04)The goal of simulating the ion implantation is to predict the distribution of implanted ions in the target and also to predict the amount of damage generated in the target. During ion implantation process, accelerated ions ...