Browsing School of Microelectronic Engineering (FYP) by Author "Zarimawaty Zailan"
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Effect of different dielectric materials for Ultrathin Oxide
Zarimawaty Zailan (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)This paper I want to describe the reliability study of the effect of different dielectric materials for ultrathin oxide. The alternative high–k gate dielectrics are to provide a substantially thicker (physical thickness) ...