Browsing School of Microelectronic Engineering (FYP) by Subject "Boron compounds"
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Investigation and Modeling of Boron Diffusion Reduction in Silicon by Flourine Implantation using Numerical Simulation
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-05)With the increased interest in the use of fluorine co-implantation with boron for boron diffusion reduction in the fabrication of semiconductor devices, it is important to understand the mechanisms by which fluorine ...