Browsing School of Microelectronic Engineering (FYP) by Subject "Clean rooms"
Now showing items 1-2 of 2
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Study and improvement of UniMAP Air Shower Room
(Universiti Malaysia Perlis, 2008-04)This Air Shower Room is a project that will be used to control air quality especially to all industry and all semiconductor factory. The air blower which is play a main function will absorb the dust and dirt from the ... -
Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on ...