Browsing School of Microelectronic Engineering (FYP) by Subject "Gallium"
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Study on diffusivity of Gallium dopant in Silicon using Spin On Dopant (SOD) technique
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Diffusion and ion implantation are two major processes by which chemical species or dopant are introduced into a semiconductor such as silicon to form the electronic structure. The diffusion process is a method to control ...