Browsing School of Microelectronic Engineering (FYP) by Subject "Scanning electron microscopes"
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Analysis of square shaped Microstructure based Electron Beam induced deposition
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly ... -
Analysis of the deposited carbon during Electron Beam Induced Deposition (EBID) in Scanning Electron Microscope using Secondary Ion Mass Spectrometry (SIMS)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron beam induced deposition (EBID) has been used to deposit carbon films that are similar ... -
Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope ... -
Study of aspect ratio performance on Silicon Oxide wet etching by using Profilometer, AFM and SEM
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)A study of aspect ratio performance on silicon oxide is developing to predict the oxide profile on surface of wafer. The main focus of this project is to perform and produce a high profile of silicon oxide under profiler ... -
Study of Deposition Time Influence the Conical Structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Atomic force microscopy (AFM) is now a well-established technique for the surface characterization and imaging of a variety of materials. In AFM the accuracy of data is often limited by the tip geometry and the effect on ...