Browsing School of Microelectronic Engineering (FYP) by Subject "Thin films"
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Effect of Annealing Temperature and Dopant Concentration on the Surface Layer of Indium Doped Ba0.5Sr0.5TiO3 Thin Film
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Barium strontium titanate (Ba0.5Sr0.5TiO3) is one of the most important sensing materials for multi-function sensors. Basically, the sensing properties can be controlled by minor modification of the dopants. The purpose ... -
Study of the thickness of the Silicon Dioxide on wafer using Dry and Wet Oxidation method
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Studies of the interaction of O2 and O with Si(100) at a fundamental level are reviewed. Both atomic and molecular chemisorbed species have been found on these surfaces. STM studies have given a great deal of information ... -
A Study on Surface Roughness and Morphology of Galliumoxide Doped Ba0.5Sr0.5TiO3 Thin Film
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-05)Thin films of perovskite BaxSr1−xTiO3 system are promising candidates for microelectronic devices that can be integrated to semiconductor circuits. The leadfree solid solution BaxSr1−xTiO3 (BST) is a high permittivity ...