Vertical-Lateral Thermal Actuator for MEMS design

Abstract

Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current apply is called joule’s heating law that explain the material can produce thermal energy by applying a current through it. The simulation is done for various dimensions of thickness, width, and length to analyze it potential for greater deflection. The vertical lateral thermal actuator has the same value of deflection as the traditional actuator deflection and that’s mean the vertical lateral actuator can be more deflection than the traditional actuator. The way of deflection for this vertical lateral thermal actuator can be bidirectional according where the voltage applied to flow the current. The bidirectional can be vertical or lateral deflection.